Last modified: 08/05/25

Products

FPD Pattern Automated Inspection System
FI-500

　

Toray FPD Pattern Automated Inspection System FI-500

FI-500 The pioneering FPD pattern automated inspection system FI-500 offers the fully automated defect inspection not only for periodic array area but also for peripheral circuit area that becomes increasingly important in LTPS TFT-LCD products.

By using the unique DSI(Die to Statistical Image Comparison) defect inspection algorithm, the false defect rate is controlled, and high and stable detection sensitivity is realized.

　

Features

  • Inspection of both the periodic array area and the peripheral circuit pattern at the same time
  • Unique defect inspection algorithm
  • High and stable detection sensitivity
  • Friendly and flexible user interface
  • High resolution defect review


Specifications

Panel size .............................. 550x650 mm (Other size is also possible)
Panel Thickness ................. 0.4-1.1 mm
Panel Transfer .................... Automatic [optional]
Objective Lens ................... 1.25x, 2.5x, 5x
Defect Detection .............. DSI Algorithm
Alignment ............................... Automatic (pattern recognition)
Dimensions ............................. 2440mm(W) x 2025mm(D) x 2030mm(H)

Please note that the specifications are subject to change without notice.


For more information:
Toray Engineering Co., Ltd.
Display System Sales Dept., Electronics Div.
1-45, Oe 1-chome, Otsu, Shiga, 520-2141 JAPAN
TEL (81)77-544-1635 FAX (81)77-544-6091


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