Toray "HS-830" is a truely automated particle inspection system for glass plates with excellent sensitivity and high throughput.

Toray's unique particle detection optics, based upon the laser-scattering & imaging technique, can accurately detect particles on the unpatterned glass substrates, and the results such as their locations and sizes are stored in a data file for later presentation or further particle review & analysis.

1. High speed and excellent sensitivity. (ex. 86 sec/glass 1100mm×1300mm)
   
2. Our new technique combining the usual laser scattering technique with imaging optics realizes high reliability and high spatial resolution.
   
3. A high magnification microscopic review system inside.