Surface Profiler SP-500

The SP-500F is the world's first 3-D areal film profiler based on vertical scanning white-light interferometry.

The SP-500F can measure the front and back surface profiles plus the thickness distribution of a transparent film simultaneously.

Its application fields include semi-conductors, data storage, LCD/PDP, plastic films, optics and precise mechanical parts.

Simultaneous measurement of the front and back surface profiles plus the film thickness variation.
Superior repeatability and accuracy with non-contact and non-destructive
Full three-dimensional areal measurement
Wide measurement range of 0-100um
Objective selectable for optimum Field-Of-View
Easy operation with Windows NT in Japanese/English
Flexible to an automated system

Model	SP-500F
Measurement Technique	Vertical Scanning Interferometry
Algorithm	Film Surface & Thickness Profiling Algorithm (KF Algorithm)
Range of Measurement	0 - 100 um (Optional: 0 - 350 um)
Applications	Resist Film Overcoat Film Color Filter Adhesive between glass plates Insulation Layer on LCD Cell Gap of LCD AR Film Wet Coated Film
Thickness Range	0.6 - 50 microns
Objectives	Selectable; 2.5X, 5X, 10X, 20X, 50X
Measurement Speed	Dependent on the various parameters; [Example] In case of 15 um range & 256*240 pixel array, 10 sec
Vertical Resolution (Display Unit)	1 nm
Measurement Array	Selectable; 512x480, 256x240, 128x120, 64x60 (max. 1376x1040 in HR model)
Computer System/OS	PC/Windows NT
Options	Same as the SP-500
Utilities	AC 90-110V; 50/60 Hz; 1 KVA

For more information:
Toray Engineering Co., Ltd.
Electronics Division
Tel:(077)544-1635 Fax:(077)544-6091
http://www.scn.tv/user/torayins/