FPD Panel Surface Profiler SP-500L

The SP-500L FPD Panel Surface Profiler automatically measures the heights, shapes and positions of various patterns on FPD panels.

The 3D profiling technique is based on a newly developed optical interferometry, which has the world fastest measurement speed with sub-micron accuracy of height measurement.

It is most suited to column spacer inspection, PDP rib inspection and TFT surface profiling.

Fully automatic FPD Panel inspection
Superior repeatability and accuracy with non-contact and non-destructive
Revolutionarily fast scan speed of maximum 100um/sec achieved by a new signal processing algorithm
Full three-dimensional areal surface measurement
Wide measurement range of 0-100um (max. 350 um; optional)
Objective selectable for optimum Field-Of-View
Easy operation with Windows NT in Japanese/English
Automatic glass substrate loading (optional)

Measurement Technique	Narrow-band White-Light Interferometry (Phase-Shift Interferometry; optional)
Algorithm	SB Algorithm; jointly invented by Tokyo Institute of Technology and Toray Engineering Co., Ltd.; Patent-Pending
Samples	FPD glass substrate
Load/Unload	Manual/Auto
Items to be Inspected	(1)Height (2)Size (Diameter; Area) (3)Position (4)Shape (Roundness, etc)
Repeatability	Dependent on the various parameters; [Example] Sigma(Average)= 20 nm for Standard Step Height
Range of Height Measurement	0 - 100 um (Optional: 0 - 350 um)
Height Resolution	1nm (0.01nm; optional)
Vertical Scan Speed	Selectable; Max. 100 um/sec
Focus	Automatic
Horizontal Resolution	Selectable; Max. 512x480 pixels [Optional: 1400x1000 pixels]
Objectives	Selectable; 2.5X, 5X, 10X, 20X, 50X
Computer System/OS	PC/Windows NT
Cleaness	Compativble to Class 10-100
Utilities	AC 200V, 1 KVA; Air; Vacuum

For more information:
Toray Engineering Co., Ltd.
Electronics Division
Tel:(077)544-1635
Fax:(077)544-6091
http://www.scn.tv/user/torayins/


Column Spacer	PDP Rib