Surface Profiling Module SP-500M

The SP-500M is a non-contact and non-destructive optical profiling module for in-situ surface topography measurement.

It is an application of the world's fastest 3-D areal surface profiler SP-500 based on vertical scanning white-light interferometry, and it can be easily integrated into the user's equipment.

The SP-500M optionally supports phase-shift interferometry.

Superior repeatability and accuracy
Revolutionarily fast vertical scan speed of maximum 100um/sec achieved by a new signal processing algorithm
Wide measurement range of 0-100um. (max. 350um optional)
Easy operation with Windows NT in Japanese/English
Low cost of ownership
Phase-shift method available (optional)

Measurement Principle	Narrow-Band White-Light Interferometry
Algorithm	SB Algorithm (jointly invented by Tokyo Institute of Technology and Toray Engineering Co., Ltd.; Patent-Pending)
Items to be Measured	Step Height; Surface Roughness; Line Width or Diameter
Repeatability	Dependent on the various parameters.
Range of Measurement	0 - 100 um (Optional: 0 - 350 um)
Resolution	1um or 0.01um
Vertical Scan Speed	Max. 100 um/sec, Selectable
Objectives	2.5X, 5X, 10X, 20X, 50X Selectable
Pixel Arrays	Selectable; max. 512480 (14001000 optional)
Field-of-View	Selectable; max. ７mm×５mm(Optional)
Control Unit	Windows ＰＣ; Windows NT
Interface	RS232C
Dimensions	Optics Module： 58mm(W) x 300mm(H) x 94mm(D)
Options	High Resolution Camera Relay Lens (1X, 0.5X)　　　 Phase-Shift Measurement Software Automatic Tip-Tilt Stages　& its Control Bump Measurement Software Magnetic Head ABS Measurement Software Spacer Column Measurement Software