Surface Profiler SP-500

The SP-700 is the world's first surface profiler for thin-film covered surfaces based on vertical scanning white-light interferometry.

The SP-700 can simultaneously measure the front and back surface profiles plus the thickness distribution of a transparent thin-film even when its thickness is under 1 micron.

Its application fields include semi-conductors, data storage, LCD/PDP, plastic films, optics and precise mechanical parts.

The SP-700 is the latest and highest model of the SP-series products.

Simultaneous measurement of the front and back surface profiles plus the film thickness variation.
Superior repeatability and accuracy with non-contact and non-destructive
Full three-dimensional areal measurement
Wide measurement range of 0-100um
Objective selectable for optimum Field-Of-View
Easy operation with Windows NT in Japanese/English
Flexible to an automated system

Model	SP-700
Measurement Technique	Vertical Scanning Interferometry
Algorithm	Thin Film Surface & Thickness Profiling Algorithm (NF Algorithm)
Range of Measurement	0 - 40 um (Optional: 0 - 200 um)
Applications	Resist Film Overcoat Film CMP Color Filter Adhesive between glass plates Insulation Layer on LCD Cell Gap of LCD
Thickness Range	0.05 - 30 microns
Objectives	Selectable; 2.5X, 5X, 10X, 20X, 50X
Measurement Speed	Dependent on the various parameters.
Vertical Resolution (Display Unit)	0.01 nm
Measurement Array	Selectable; 512x480, 256x240, 128x120, 64x60 (max. 1376x1040 in HR model)
Computer System/OS	PC/Windows NT
Options	Same as the SP-500
Utilities	AC 90-110V; 50/60 Hz; 1 KVA

For more information:
Toray Engineering Co., Ltd.
Electronics Division
Tel:(077)544-1635 Fax:(077)544-6091
http://www.scn.tv/user/torayins/